Abstract

The high-resolution electron microscope has been used successfully to study the structure and morphology of thin films including interfaces at near-atomic resolution. Recently the technique has been expanded to study the dynamics of thin film transformations and reactions in real time. These techniques possess enormous potential for those who wish to obtain atomic-level information of value in characterizing thin-film deposits and the changes they undergo with a variety of treatments. Four illustrations are given here.

© 1988 Optical Society of America