Abstract

Interfaces between adjacent layers contribute essentially to laser damage in dielectric film systems. Due to different thermal and mechanical properties of the adjacent materials stress is built up in the interface region by heating during laser exposition. Generally interface absorption exceeds volume absorption and an additional amount of heat is generated at the boundaries. In contrast to this layer adhesion is small at the interfaces. Therefore, in many cases, laser induced damage of dielectric systems starts at the boundaries of the layers.

© 1988 Optical Society of America