Si(1-x)Nx Near Infrared Rugate Filter Fabrication by Ion Beam Assisted Deposition

E.P. Donovan; D. Van Vechten; D. Van Vechten; A. Kahn; C.A. Carosella; G.K. Hubler

doi:10.1364/OIC.1988.TuF2

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1988),
paper TuF2
•https://doi.org/10.1364/OIC.1988.TuF2

Si_(1-x)N_x Near Infrared Rugate Filter Fabrication by Ion Beam Assisted Deposition

E.P. Donovan, D. Van Vechten, A. Kahn, C.A. Carosella, and G.K. Hubler

Optical Interference Coatings 1988

Tucson, Arizona United States
12–15 April 1988
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Rugate Filters (TuF)

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E. P. Donovan, D. Van Vechten, A. Kahn, C. A. Carosella, and G. K. Hubler, "Si(1-x)Nx Near Infrared Rugate Filter Fabrication by Ion Beam Assisted Deposition," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1988), paper TuF2.

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Abstract

Infrared rugate filters were fabricated under computer control by nitrogen beam-assisted silicon e-beam evaporation. Refractive index, composition, deposition parameters, and thermal treatments were correlated.

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