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From light scattering to the microstructure of thin film multilayers

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Abstract

Light scattering from optical coatings takes its origins in the structural irregularities at interfaces and in the bulk of materials in thin film form. For this it carries information relative to the materials microstructure and may constitute a powerful tool for characterization. However this information is not easy to extract because of the complex relations that connect the scattered light to the microstructural parameters of the stack. This is one kind of inverse problem involving numerous parameters while we have only few equations given by the measurements. Our efforts have continued in Marseilles in this field and we will point out the level of understanding that has been reached.

© 1992 Optical Society of America

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