Abstract

Manufacturing optical interference coating in infrared region is similar to that in visible but more strict deposition process must be followed. Because of the special problems in infrared region like low signal to noise ratio, more and thicker layers in coating design and lack of usable coating materials, there are still some problems in the deposition process. In this paper, our discussion will be focused on the optical thickness monitoring during coating deposition.

© 1992 Optical Society of America