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Optical Properties of Metal Oxide Coatings Deposited Using Reactive Sputtering

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Abstract

Refractory metal oxide coatings are widely used for optical interference applications. These materials, used for bandpass interference filters, beamsplitters, anti-reflection coatings and protective coatings, are very hard and have a wide transmission range which extends from the UV to mid-IR. The materials included in this work cover a large index of refraction range.

© 1992 Optical Society of America

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