Plasma Impulse Chemical Vapour Deposition of Optical Coatings on Plastics

M. Heming

doi:10.1364/OIC.1995.TuB2

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1995),
paper TuB2
•https://doi.org/10.1364/OIC.1995.TuB2

Plasma Impulse Chemical Vapour Deposition of Optical Coatings on Plastics

M. Heming

Optical Interference Coatings 1995

Tucson, Arizona United States
5–9 June 1995
ISBN:

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Deposition and Process: 2 (TuB)

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M. Heming, "Plasma Impulse Chemical Vapour Deposition of Optical Coatings on Plastics," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1995), paper TuB2.

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Abstract

PCVD techniques, although well established in the semi-conductor industry to deposit dielectric coatings had so far little impact on the optical coating industry due to the lack of sufficient uniformity in cw-processes.

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