Abstract
In order to deposit complex optical multilayer coatings, accurate layer thickness control during deposition is required. Several different approaches will be reviewed including quartz crystal monitoring, single wavelength optical monitoring (most-sensitive wavelength or extremum) and wideband optical monitoring. The advantages and disadvantages of each method will be discussed and examples of multilayer coatings deposited by each method will be presented.
© 1995 Optical Society of America
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