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Calorimetric absorption measurements of substrates and coatings for excimer lasers

E. Eva and K. Mann

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Abstract

Absorption of intense UV-light can cause deterioration of optical components [1]. To investigate the mechanisms involved, sensitive measurements of absolute absorptance are needed. A calorimeter determines the energy dissipated in a sample under irradiation by measuring the temperature rise ΔT, thus it is particularly suited for characterization of dielectic thin films for high power excimer laser applications which may be damaged by absorption heating [2].

© 1995 Optical Society of America

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