Abstract

A unique mapping instrument which locates and classifies the size of particulate contaminants has been built to quantify optical surfaces on substrates as large as 14 inches by 27 inches. The idea of a defect mapping system (DMAP1) was originally investigated as an evaluation tool in the fabrication of liquid crystal devices. Removal of surface particulate is critical to the manufacture of high laser damage resistant LC devices.¹ During operation of Omega, a high-peak power laser system, random particles on an optical surface are vaporized and contamination is left behind. The major failure mode for LC devices is the decomposition of the LC fluid layer due to the heating of extrinisic impurities trapped within the cell. Use of this new surface characterization equipment will not only benefit LC production but it will be important in the evaluation of cleaning procedures prior to coating optics.

© 1995 Optical Society of America