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Conferences > OIC > 1998 > MA > MA.13

Interference Coatings based on Synthesis Silicon Nitride

Cheng-Chung Lee, Sharu-Lii Chen, Jin-Cherng Hsu, and Chuen-Lin Tien

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Abstract

Silicon nitride films have very good optical properties and have been investigated by several authors1-8 This paper reports in detail the synthesis of SiNx films by electron beam evaporation of pure silicon accompanied with nitrogen ion bombardment and the results of investigation on composition and optical properties. The application on fabrication of near infrared interference coating has been discussed.

© 1998 Optical Society of America

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