Abstract

A substrate-specific, through-planet, wideband optical coating monitor is being developed to increase production yield and the understanding of physical vapor deposition (PVD) coatings fabricated in the Optical Manufacturing Laboratory at the University of Rochester’s Laboratory for Laser Energetics. In-situ wideband optical monitoring of planetary rotation systems allows direct monitoring of large, expensive substrates with complex layering schemes. The optical monitor discussed here is under development for coating several large (e.g., 80.7 x 41.7 x 9.0 cm) polarizers for the National Ignition Facility. Wideband optical monitoring of the production substrates is used in concert with an array of crystal monitors for process control, film parameter evaluation, and error detection with associated design reoptimization.

© 1998 Optical Society of America