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Fourier transform approach for thin film characterization

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Abstract

A Fourier tranform approach was recently proposed by Swart and co-workers for thin film characterization.1 It is based on the observation that the reflectance spectrum of multilayer coatings contains detailed information about the layer thicknesses. When the Fourier transform of the reflectance R is computed in a spectral region where dispersion and losses are negligible, peaks are observed in positions corresponding to the layer interfaces.

© 1998 Optical Society of America

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