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Light scattering characterization of superpolished transparent substrates

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Light scattering characterization of surface roughness is used from numerous years. However this technique presents difficulties when the substrates are transparent, because of simultaneous scattering from both faces of the sample. We show how to solve this point and apply these principles to the characterization of superpolished samples used in the framework of DACO European project.

© 2004 Optical Society of America

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