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Conferences > OIC > 2007 > MA > MA4

Flexible High Throughput Deposition of Optical Coatings Using Closed Field Magnetron Sputtering

D. R. Gibson, I. Brinkley, E.M. Waddell, and J. Walls

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Abstract

“Closed field” magnetron (CFM) sputtering offers a flexible and high throughput deposition process for optical coatings. CFM sputtering uses two or more different metal targets to deposit multilayers comprising dielectrics, metals and conductive oxides. optical properties.

© 2007 Optical Society of America

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