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Development and applications of ultra-thin metallic films fabricated by Physical Vapor Deposition

Antonin Moreau, Riley Shurvinton, Nicolas Morati, Fabien Lemarchand, Balint Eles, Nathalie Destouches, and Julien Lumeau

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Abstract

In this study, we explore the specificities of ultra-thin metallic films deposited by electron beam deposition. Fabrication difficulties and repeatability are first presented. Applications such as metasurfaces or metal-dielectric structures for color control are then discussed.

© 2022 The Author(s)

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