Influence of FeCo Layers Thickness on the Interfacial Asymmetry of FeCo/Si Multilayers Fabricated by the Direct Current Magnetron Sputtering

Jialian He; Zhong Zhang; Yang Liu; Qiushi Huang; Zhanshan Wang

doi:10.1364/OIC.2022.ME.5

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper ME.5
•https://doi.org/10.1364/OIC.2022.ME.5

Influence of FeCo Layers Thickness on the Interfacial Asymmetry of FeCo/Si Multilayers Fabricated by the Direct Current Magnetron Sputtering

Jialian He, Zhong Zhang, Yang Liu, Qiushi Huang, and Zhanshan Wang

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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J. He, Z. Zhang, Y. Liu, Q. Huang, and Z. Wang, "Influence of FeCo Layers Thickness on the Interfacial Asymmetry of FeCo/Si Multilayers Fabricated by the Direct Current Magnetron Sputtering," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper ME.5.

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Abstract

For FeCo/Si multilayers, The FeCo layers transit from amorphous to crystalline as their thickness thicker than 4.0nm, severe and asymmetry interfacial diffusion exited, because of the difference of surface free energy of Fe₈₉Co₁₁ and Si.

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