Conformal optical coatings on complex 3D-macrostructures using atomic layer deposition

John Rönn; Mikko Konttinen; Kalle Niiranen; Mikael Saarniheimo; Sami Sneck

doi:10.1364/OIC.2022.TC.4

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper TC.4
•https://doi.org/10.1364/OIC.2022.TC.4

Conformal optical coatings on complex 3D-macrostructures using atomic layer deposition

John Rönn, Mikko Konttinen, Kalle Niiranen, Mikael Saarniheimo, and Sami Sneck

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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Conformal Deposition Methods (TC)

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J. Rönn, M. Konttinen, K. Niiranen, M. Saarniheimo, and S. Sneck, "Conformal optical coatings on complex 3D-macrostructures using atomic layer deposition," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper TC.4.

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Abstract

We present conformal optical coatings on complex 3D-macrostructures using atomic layer deposition. For 13 different low-loss oxide processes, we report thickness and refractive index non-uniformities of 0.43-2.64% and 0.04-0.42%, respectively.

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