Optical characterization of the impact of 100 keV protons on the optical properties of ZrO2 films prepared by ALD on fused silica substrates

A. Sytchkova; M.L. Protopapa; P. Olivero; E. Burresi; L. Tapfer; M. Palmisano; E. Pesce; T. Dunatov; Y. Wang; H. He

doi:10.1364/OIC.2022.WA.2

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper WA.2
•https://doi.org/10.1364/OIC.2022.WA.2

Optical characterization of the impact of 100 keV protons on the optical properties of ZrO₂ films prepared by ALD on fused silica substrates

A. Sytchkova, M.L. Protopapa, P. Olivero, E. Burresi, L. Tapfer, M. Palmisano, E. Pesce, T. Dunatov, Y. Wang, and H. He

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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Space and Imaging Applications; Coatings for Gravitational Wave Detectors I (WA)

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A. Sytchkova, M. L. Protopapa, P. Olivero, E. Burresi, L. Tapfer, M. Palmisano, E. Pesce, T. Dunatov, Y. Wang, and H. He, "Optical characterization of the impact of 100 keV protons on the optical properties of ZrO2 films prepared by ALD on fused silica substrates," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper WA.2.

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Abstract

ALD-grown ZrO₂ films underwent irradiation by 100keV protons at various fluences. The induced structural damage modeled by SRIM was compared with the optical properties change characterized by ellipsometry, spectrophotometry and X-ray reflectivity.

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