Improving Optical Monitoring Accuracy by Including Systematic Transmittance Deviations

Thomas Melzig; Stefan Bruns; Michael Vergöhl; Jörg Terhürne

doi:10.1364/OIC.2022.WC.8

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper WC.8
•https://doi.org/10.1364/OIC.2022.WC.8

Improving Optical Monitoring Accuracy by Including Systematic Transmittance Deviations

Thomas Melzig, Stefan Bruns, Michael Vergöhl, and Jörg Terhürne

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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PVD Methods: Technology Improvement and Optical Monitoring (WC)

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T. Melzig, S. Bruns, M. Vergöhl, and J. Terhürne, "Improving Optical Monitoring Accuracy by Including Systematic Transmittance Deviations," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper WC.8.

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Abstract

The accuracy of broadband monitoring during coatings can be improved by transmittance measurement of the uncoated or backcoated monitor substrate before process start. Numerical comparison with the theory eliminates e.g. water absorption or spectrometer transitions.

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