Advances in direct optical monitoring using a wideband spectrometer and a new thin film optical monitoring software

D. Arhilger; H. Hagedorn; M. Jäger; A. Zöller

doi:10.1364/OIC.2022.WC.7

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper WC.7
•https://doi.org/10.1364/OIC.2022.WC.7

Advances in direct optical monitoring using a wideband spectrometer and a new thin film optical monitoring software

D. Arhilger, H. Hagedorn, M. Jäger, and A. Zöller

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

From the session
PVD Methods: Technology Improvement and Optical Monitoring (WC)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
D. Arhilger, H. Hagedorn, M. Jäger, and A. Zöller, "Advances in direct optical monitoring using a wideband spectrometer and a new thin film optical monitoring software," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper WC.7.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Get Video
Citation alert
Save article

Abstract

A new thin film optical monitoring software (TOMS) has been developed, supporting the in-situ direct optical monitoring and process simulation with various thickness control strategies. We discuss the functionalities and present various coating results.

PDF Article | Presentation Video

More Like This

High throughput PIAD with an advanced RF-plasma source and direct optical monitoring

A. Zöller, D. Arhilger, M. Boos, H. Hagedorn, and H. Reus
WA.8 Optical Interference Coatings (OIC) 2016

A wideband optical monitor for a planetary-rotation coating-system

Mark B. Campanelli and Douglas J. Smith
ThE.7 Optical Interference Coatings (OIC) 1998

High-Resolution Optical Broadband Monitoring for the Production of Miniaturized Thin-Film Filters

F. Carstens, H. Ehlers, S. Schlichting, L. Jensen, and D. Ristau
WA.7 Optical Interference Coatings (OIC) 2019

Previous Article Next Article

Poster Presentation

Media 1: PDF (677 KB)

Presentation Video

Presentation video access is available to:

Optica Publishing Group subscribers
Technical meeting attendees
Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads