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Progress and Challenges in HEMT LSI Technology

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Abstract

Six years have now passed since the announcement in 1980 of the High Electron Mobility Transistor (HEMT)1), and HEMT technology has certainly opened the door to new possibilities for ultra-high-speed LSI/VLSI applications2). Due to the supermobility GaAs/AlGaAs heterojunction structure, the HEMT is especially attractive for low-temperature operations at liquid nitrogen temperature. For LSI level complexity, HEMT technology has made it possible to develop a 1.5 kgate gate array with an 8 x 8 bit parallel multiplier3) for logic circuits, and 4 kbit static RAM for memory circuits.4)

© 1987 Optical Society of America

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