Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > PFM > 2006 > CB > CB14
  • A NIST Symposium for Photonic and Fiber Measurements
  • Technical Digest Series (Optica Publishing Group, 2006),
  • paper CB14

Metrology of integrated waveguide devices and systems using near-field scanning optical microscopy

Guangwei Yuan and Kevin L. Lear

Not Accessible

Your library or personal account may give you access

Abstract

Near-field scanning optical microscopy (NSOM) is a valuable tool for measuring modal propagation parameters including loss, effective index, and coupling coefficients of a variety of waveguide structures. Examples are provided of simple waveguide sections and bends as well as an on-chip optical clock distribution system using an H-tree containing splitters and leaky-mode polysilicon photodiodes.

PDF Article
More Like This
Characterization of a 90° waveguide bend using near-field scanning optical microscopy

Guangwei Yuan, Matthew D. Stephens, David S. Dandy, and Kevin L. Lear
CThBB6 Conference on Lasers and Electro-Optics (CLEO:S&I) 2006

Optical characterization of a leaky-mode polysilicon photodetector using near-field scaning optical microscopy

G. Yuan, P. Nikkel, C. Thangaraj, T. W. Chen, R. Pownall, A. Iguchi, and K. L. Lear
CThD4 Conference on Lasers and Electro-Optics (CLEO:S&I) 2006

Waveguide Group Velocity Determination by Spectral Interference Measurements in Near-Field Optical Scanning Microscopy

J. D. Mills, T. Chaipiboonwong, M.D.B Charlton, M.E. Zoorob, M.C. Netti, J.J. Baumberg, and W.S. Brocklesby
QTuA1 Quantum Electronics and Laser Science Conference (CLEO:FS) 2006

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use