Electrically Actuated Nanomechanical Integrated Optical Switches

P. Pliska; W. Lukosz

doi:10.1364/PS.1993.SMS64

Photonics in Switching
Technical Digest Series (Optica Publishing Group, 1993),
paper SMS64
•https://doi.org/10.1364/PS.1993.SMS64

Electrically Actuated Nanomechanical Integrated Optical Switches

P. Pliska and W. Lukosz

Photonics in Switching 1993

California United States
15–17 March 1993
ISBN:

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Semiconductor Modulators and Switches (SMS)

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P. Pliska and W. Lukosz, "Electrically Actuated Nanomechanical Integrated Optical Switches," in Photonics in Switching, Technical Digest Series (Optica Publishing Group, 1993), paper SMS64.

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Abstract

We demonstrated modulation, switching, and deflection of guided waves in (non-electrooptic) waveguides on silicon, the required effective-index changes being induced nanomechanically by electrostatic forces.

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