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Electrically Actuated Nanomechanical Integrated Optical Switches

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Abstract

We report on modulation, directional switching, and deflection of guided waves actuated by nano-mechanically induced effective-refractive-index changes ΔN. The integrated optical (IO) devices are actuated electrically. No electrooptic materials are required; glass waveguides on silicon are used.

© 1993 Optical Society of America

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