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Integrated Low Loss MEMS Phase Shifter with Single- Photon Detection

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Abstract

We integrate phase shifter and superconducting nanowire single-photon detector into one device and demonstrate a Vπ of 6.0 V and an on-chip detection efficiency of up to 89 % ± 10 % at 1.3 K.

© 2021 The Author(s)

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