UV-Ozone Oxide Treatment for Improved Surface Passivation

Munan Gao; Winston Schoenfeld; Ngwe Zin

doi:10.1364/PVLED.2020.PvTu2G.5

OSA Advanced Photonics Congress (AP) 2020 (IPR, NP, NOMA, Networks, PVLED, PSC, SPPCom, SOF)
OSA Technical Digest (Optica Publishing Group, 2020),
paper PvTu2G.5
•https://doi.org/10.1364/PVLED.2020.PvTu2G.5

UV-Ozone Oxide Treatment for Improved Surface Passivation

Munan Gao, Winston Schoenfeld, and Ngwe Zin

Optical Devices and Materials for Solar Energy and Solid-state Lighting 2020

Washington, DC United States
13–16 July 2020
ISBN: 978-1-943580-79-8

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Silicon Solar Cells (PvTu2G)

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M. Gao, W. Schoenfeld, and N. Zin, "UV-Ozone Oxide Treatment for Improved Surface Passivation," in OSA Advanced Photonics Congress (AP) 2020 (IPR, NP, NOMA, Networks, PVLED, PSC, SPPCom, SOF), L. Caspani, A. Tauke-Pedretti, F. Leo, and B. Yang, eds., OSA Technical Digest (Optica Publishing Group, 2020), paper PvTu2G.5.

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Abstract

Surface passivation is a key process to achieve high-efficiency in silicon solar cells. In this paper we applied UV-ozone treatment to achieve high-quality passivation on both planar and textured, n-type and p-type wafers.

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