Abstract

The specular and off-specular reflectivity of radiation from single surfaces possessing roughness has been extensively discussed both within the framework of the Born Approximation and the Distorted Wave Born Approximation (DWBA). The same ideas can be generalized to reflectivities from multilayer structures. An Interesting effect arises due to the fact that the interface fluctuations between layers are usually highly correlated. This is shown to lead to structure in the off-specular reflectivity which mimics the structure found in the true specular reflectivity (e.g., Bragg peaks, etc.). In fact, such structure can persist due to interlayer height correlations for q_z values where the true specular Bragg peaks have vanished due to large global roughness.

© 1992 Optical Society of America