Abstract

It is common knowledge that substrate roughness plays an important role in limiting the specular reflectance of x-ray multilayers. However, there have been relatively few systematic experimental studies of the effects of substrate roughness on x-ray multilayer reflectivity. We have begun to investigate these effects by measuring the specular and off-specular scattering from a set of substrates with different roughness and from tungsten/carbon multilayers deposited simultaneously onto an identical set of substrates.

© 1992 Optical Society of America