Multilayer Growth Dynamics: Experimental Optimization of Interface Structures

D. E. Savage

doi:10.1364/PXRAYMS.1994.MB.2

Physics of X-Ray Multilayer Structures
Technical Digest Series (Optica Publishing Group, 1994),
paper MB.2
•https://doi.org/10.1364/PXRAYMS.1994.MB.2

Multilayer Growth Dynamics: Experimental Optimization of Interface Structures

D. E. Savage

Physics of X-Ray Multilayer Structures 1994

Wyoming United States
14–17 March 1994
ISBN:

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D. E. Savage, "Multilayer Growth Dynamics: Experimental Optimization of Interface Structures," in Physics of X-Ray Multilayer Structures, Technical Digest Series (Optica Publishing Group, 1994), paper MB.2.

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Abstract

The evolution of interfacial roughness in multilayer films is examined by varying deposition parameters. X-ray scattering results from W/C will be compared with growth models.

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