Abstract

Glancing-incidence x-ray analysis (GIXA) is a combination of x-ray reflectivity and angle-dependent x-ray fluorescence (AD-XRF) in one instrument [1]. This method enables to obtain the compositional depth profile of layered materials, exploiting x-ray standing waves (XSW) [2]. With the same set-up, also diffuse scattering can be measured, yielding information on the lateral extent of interface roughness [3, 4, 5]. It is well known that specular reflectivity and AD-XRF depend on the root-mean square (r.m.s.) value of the interface roughness. As we will discuss below, they are affected by its lateral extent as well. First, however, we give some examples to show how XSW effects can be exploited for depth profiling of multilayers.

© 1994 Optical Society of America