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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper PTuE1

Biochemical IC chips with light driven mechanism fabricated by hybrid micro/nano stereolithography

Open Access Open Access


The module micro chemical device named Biochemical IC chips have been developed by the authors for these years. The several light driven micro mechanisms to handle biochemical object were successfully fabricated by the combination of micro and nano stereolithography.

© 2004 Optical Society of America

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