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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper PTuE2

Laser micromachining by UV, deep UV and fs lasers

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Abstract

Excimer lasers, F2 lasers, UV solid-state laser and fs lasers are showing promise in an increasing number of novel applications with potential for mass manufacture at realistic costs and production rates. This paper gives an overview of some of the latest applications of micromachining with these lasers.

© 2004 Optical Society of America

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