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Conferences > SELED > 2023 > JTu4A > JTu4A.34

Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS

Yi-Nung Chao, Yuan-Jie Lu, and Sheng-Hui Chen

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Abstract

HiPIMS was utilized to produce Indium-Gallium-Zinc-Oxide (IGZO) films and evaluate their IR transmittance, resistivity, carrier mobility, and carrier concentration at various HiPIMS duty cycles and oxygen flux, in order to determine the optimal process parameters.

© 2023 The Author(s)

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