Abstract

We report a successful fabrication of a large monolithic two-dimensional array of GaInAsP/InP surface-emitting lasers, which has an overall size of 3 mm × 1 nim and contains a total of 112 lasers with good uniformity and high output power. This work represents perhaps the first demonstration of a large-scale monolithic integration of diode lasers. Moreover, the monolithic 2D arrays have a number of potential applications requiring very high output power, high energy-conversion efficiency and good output beam quality (when phase-locked).

© 1987 Optical Society of America