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High normal incidence reflectivities have been demonstrated for multilayer optics in the soft x-ray and extreme ultraviolet spectral domains. These structures have potential for application in short wavelength laser systems. This application, particularly in the time and intensity domains, is extreme. The current status of multilayer-optic developments are reviewed and implications of the unique characteristics of short wavelength laser systems relative to application of such optics are discussed.
© 1986 Optical Society of America
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