Abstract

A Nd:Yag laser, giving 8ns pulses of 0.8J at a wavelength of 1064 nm with a repetition rate of up to 20Hz, is being used to generate a plasma that acts as a source of soft x-rays. The laser irradiance on the target is about 10¹⁶ Wm^–2 and, by positioning a specially designed specimen chamber close to the target, sufficient x-rays are obtained for single pulse imaging in contact microscopy. After characterization of various target materials in terms of the x-ray wavelengths emitted as a function of the laser pulse parameters, the source will be developed and optimized for studies in contact microscopy, x-ray lithography (including the replication of soft x-ray zone pulses manufactured at King's College⁽¹⁾) and for the characterization of soft x-ray optical components (zone plates and multi­layer mirrors). Further planned developments include upgrading the source to give more energy per pulse and a range of laser wavelengths (using frequency multiplying crystals), and the installation of a multilayer mirror deposition system that will use alternate pulses for laser deposition of the layers and in-situ monitoring of the x-ray reflectivity.

© 1986 Optical Society of America