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Conferences > SXRAY > 1991 > FC > FC3

Design & development of an integrated laser-plasma soft-X-ray projection system

F. Bijkerk, H.-J. Voorma, E.J. Pulk, E. Louis, M.J. van der Wiel, J. Verhoeven, E. van der Drift, and H. Romijn

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Abstract

We report on design and development activities of an integrated soft-X-ray projection system, consisting of all-reflective multilayer optics and a repetitive laser plasma soft-X-ray source.

© 1991 Optical Society of America

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