Abstract

The National Institute of Standards and Technology (NIST), as part of its soft x-ray metrology program, is constructing a new reflectometry beamline designed to improve our XUV measurement service. The new facility, intended primarily to characterize soft x-ray multilayer optics and to measure the optical properties of materials, consists of a newly commissioned varied line-spaced grating monochromator and a new reflectometry chamber currently under construction. The monochromator is designed to cover the 3.5 – 40 nm region of the spectrum with high throughput, a resolving power of 100 to 2000, and a spot size of 0.5 mm x 0.5 mm. In addition, the reflectometer is designed to measure the specular and non-specular reflectivities of optics up to 35 cm in diameter at any orientation with respect to the incoming x-ray beam. In this talk, we describe the optical properties and the performance of the new monochromator and discuss the capabilities of a hybrid reflectometer consisting of the newly commissioned monochromator and the existing reflectometer chamber already in use at NIST.

© 1993 Optical Society of America