Abstract

A long undulator installed at the ALS, a low emittance storage ring, generates quasi-monochromatic beams of high brightness and improved coherence properties that could be used for "at wavelength" interferometry for x-ray projection lithography experiments. However, the heat load produced by intense beams impinging on mirrors and gratings can deform their surfaces considerably, and thus, degrade the coherence and brightness qualities and overall performance of the beamline. It is therefore necessary to accurately describe the surfaces of the distorted mirrors and gratings to ensure that the brightness and coherence properties of the undulator radiation are preserved through the beamline.

© 1993 Optical Society of America