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Conferences > Sensors > 2023 > SM4D > SM4D.3

Fourier Optics Modeling of Deeply Etched Silicon Cavities with Submillimeter Gap for Optical Sensing Applications

Hussein E. Kotb, Yasser M. Sabry, Ahmed Mahfouz, and Haitham Omran

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Abstract

We present a Fourier optics model for deeply etched Silicon micro cavities for optical sensing applications. The cavity consists of two deeply etched curved Silicon mirrors with submillimetre gap for insertion of micro samples under test. The model substantially reduces the simulation time required to model the cavity performance compared to FDTD and FEM techniques and shows good agreement with experimental results.

© 2023 The Author(s)

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