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Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency

Wissem Sfar Zaoui, María Félix Rosa, Wolfgang Vogel, Manfred Berroth, Jörg Butschke, and Florian Letzkus

Open Access Open Access

Abstract

A highly efficient grating structure for the coupling between standard optical fibers and single-mode waveguides in the silicon-on-insulator platform realized in a CMOS fabrication process is presented. The cost-effective method introduces a backside metal mirror to the grating coupler without need of an extensive wafer-to-wafer bonding. A coupling efficiency of −1.6 dB (around 69%) near the telecommunication wavelength 1550 nm and a large 1dB-bandwidth of 48 nm are achieved.

©2012 Optical Society of America

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Figures (5)
Fig. 1
Fig. 1 (a) Three dimensional cross section of the proposed grating coupler. (b) Simulated coupling efficiency of the coupler with Λ = 600 nm and α = 9° versus the BOX-thickness at a wavelength of 1550 nm. (c) Electric field distribution of the structure with dBOX = 3 µm.

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Fig. 2
Fig. 2 Simulated normalized transmission of the launched power onto the grating coupler (a) without the metal mirror, and (b) with the metal mirror on the backside. For both couplers Λ = 600 nm, α = 9°, and dBOX = 3 µm.

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Fig. 3
Fig. 3 (a) Microscopic picture of the fabricated structure composed of two grating couplers with backside mirrors and connected by a waveguide. (b) Front and back side view of the metal mirror.

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Fig. 4
Fig. 4 Measured coupling efficiency of 3 different grating couplers with Λ = 595 nm, 600 nm, 605 nm with a metal mirror underneath at a fiber tilt angle of 8°. The zoom-in shows the high coupling efficiency of −1.63 dB at 1539 nm achieved by the coupler having a period of 600 nm.

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Fig. 5
Fig. 5 Measured coupling efficiency of the designed grating coupler with and without the backside metal mirror.

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Equations (2)

Equations on this page are rendered with MathJax. Learn more.

k in sinα+m 2π Λ =β
η dB =− 1 2 ( P in,dBm − P out,dBm − a S − a W ⋅L )
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