Abstract

Deposition parameters required for producing zirconia films for use in optical multilayer systems by electron-beam gun evaporation of zirconia and zirconium starting materials were investigated. The optical constants were determined as a function of distance, partial pressure of oxygen, and angle of incidence. The direct and reactive evaporation processes yielded ZrO₂ films with refractive indices of 2.08 and 2.14, respectively, for vapor incident on the substrate at normal incidence.

© 1989 Optical Society of America

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