Abstract
In order to solve the problem that the grating quality cannot be monitored directly in real time, we provided a method based on Rayleigh criterion with our designing optical measurement structure to measure yaw and displacement errors of a grating ruling machine feeding system. Gratings are ruled with or without errors correction by the real-time monitoring system . It shows that the resolution obtained without errors correction is reduced from 99.97% to 87.47% of theoretical value, while the resolution obtained with errors correction is stable, remaining at 99.99%–97.21%. The experimental result is that the grating quality can be guaranteed by monitoring grating resolution in real time.
© 2015 Optical Society of America
Full Article | PDF ArticleMore Like This
Chao Yang, Xiaotian Li, Haili Yu, Hongzhu Yu, Jiwei Zhu, Shanwen Zhang, Jianxiang Gao, Bayanheshig, and Yuguo Tang
Appl. Opt. 54(13) 4084-4088 (2015)
Xiaotian Li, Haili Yu, Xiangdong Qi, Shulong Feng, Jicheng Cui, Shanwen Zhang, Jirigalantu, and Yuguo Tang
Appl. Opt. 54(7) 1819-1826 (2015)
Xiaotao Mi, Haili Yu, Hongzhu Yu, Shanwen Zhang, Xiaotian Li, Xuefeng Yao, Xiangdong Qi, Bayinhedhig, and Qiuhua Wan
Appl. Opt. 56(21) 5857-5864 (2017)