Abstract

To improve the quality and success rate of grating ruling, we theoretically analyze the factors that affect the grating performance according to the Fraunhofer far-field diffraction method. The analysis shows that the yaw angle error of the grating line has a greater impact on the performance index. Based on this result, we simulate and analyze the angle error by the principle of mechanical simulation. Then we determine the thickness of the spring sheet, the number of connecting steel sheets, and the initial closing force of the tension spring. We use the optimized workbench structure of the grating ruling machine to rule three gratings. The diffracted wavefronts are all better than $\lambda /{{3}}$, and the success rate is 100%, which means that the experiments verify the effectiveness of the modified workbench structure.

© 2021 Optica Publishing Group

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