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Ptychography for optical metrology with limited translation knowledge

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Abstract

We introduce unknown-transverse translation diversity phase retrieval: a ptychographic algorithm for optical metrology when a subaperture is translating through a plane conjugate to the exit pupil in a very poorly known fashion. The algorithm estimates the direction of translation and the distance traveled by the subaperture from one point spread function (PSF) to the next. It also estimates unknown point target motion and rotations of the subaperture between PSF acquisitions from the PSF data.

© 2016 Optical Society of America

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Corrections

7 June 2016: Corrections were made to the body.


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