Abstract

This paper reports a non-coplanar misalignment optical waveguide cantilever sensor realizing a monotonic response with a large operation range. A ${1} \times {2}$ Y-branch optical power splitter cantilever structure was designed, and one of the branches was reduced in thickness at the end, as a non-coplanar structure with respect to another. The misalignment coupling of the two branches due to the thickness of one branch leads to a monotonic response of an optical waveguide cantilever sensor. The simulation results showed a monotonic response with a sensitivity of ${6} \times {{10}^{- 4}}\;{{\rm nm}^{- 1}}$ in a large operation range of ${-}{1}$ to 1 µm.

© 2022 Optica Publishing Group

Integrated optical readout using a hybrid plasmonic directional coupler in water

Ruo-Zhou Li, Ying Yu, Xiao-Yang Zhang, and Tong Zhang
Appl. Opt. 56(25) 7230-7236 (2017)

In-plane photonic transduction of silicon-on-insulator microcantilevers

Jong Wook Noh, Ryan Anderson, Seunghyun Kim, Jaime Cardenas, and Gregory P. Nordin
Opt. Express 16(16) 12114-12123 (2008)

Optical nanomechanical sensor using a silicon photonic crystal cantilever embedded with a nanocavity resonator

Chengkuo Lee and Jayaraj Thillaigovindan
Appl. Opt. 48(10) 1797-1803 (2009)

Static and dynamic disturbance compensation for optical misalignment of large ground-based wide field survey telescope

Yuyan Cao, Jianli Wang, Wenqiang Fan, Zhichen Wang, Honghao Wang, Yang Liu, Fuguo Wang, Hongwen Li, and Wei Xu
Appl. Opt. 61(13) 3566-3578 (2022)

Wide cantilever stiffness range cavity optomechanical sensors for atomic force microscopy

Yuxiang Liu, Houxun Miao, Vladimir Aksyuk, and Kartik Srinivasan
Opt. Express 20(16) 18268-18280 (2012)