Abstract

To reduce the error induced by light source fluctuations, motor rotation instability, environment, and other factors in real-time measurements using dual-rotating compensator Mueller matrix ellipsometry (DRC-MME), an error-correction method based on a reference optical path is proposed. A modified Mueller matrix expression was derived theoretically by introducing the reference optical path of the DRC-MME system. Simulation analysis and experimental verification of the air, polarizer, and ${\rm{Si}}{{\rm{O}}_2}$ samples were performed using this method. The absolute error of the Mueller matrix elements of the ${\rm{Si}}{{\rm{O}}_2}$ samples decreased from less than 0.028 to less than 0.008, and the standard deviation decreased from 0.9% to 0.3%. This method has certain guiding significance in improving the measurement accuracy of DRC-MME.

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