Abstract

Microlens arrays (MLAs) are widely used in homogenized laser beams due to excellent optical properties. However, the interference effect generated in traditional MLA (tMLA) homogenization will reduce the quality of the homogenized spot. Hence, the random MLA (rMLA) was proposed to reduce the interference effect in the homogenization process. To achieve mass production of these high-quality optical homogenization components, the rMLA with randomness in both period and sag height was proposed first. Subsequently, MLA molds were ultra-precision machined on S316 molding steel by elliptical vibration diamond cutting. Furthermore, the rMLA components were precisely fabricated by applying molding technology. Finally, Zemax simulation and homogenization experiments were carried out to verify the advantage of the designed rMLA.

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