Abstract

To overcome the diffraction limit, a laser irradiating cantilevered scanning near-field optical microscopy (SNOM) probe has been used in near-field optical nanopatterning. In this paper, the mechanism of nanopatterning on noble metal nano-films by this technique is investigated by the finite element method. It is proposed that the main mechanism of this phenomenon is the melt and reshaping of the nano-film under the SNOM tip. The melt is caused by the surface plasmon polariton-assisted enhancement and restriction within the SNOM tip aperture. The impacts of the gap $g$ between the tip and substrate and the polarization of the laser are further analyzed.

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